Thin film capacitor and apparatus for manufacturing same

Details Thin film capacitor and apparatus for manufacturing same Thin film capacitor and apparatus for manufacturing same

1992-06-18

1993-11-02

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361311, 29 2542, H01G 410, H01G 412, H01G 700

Patent

active

052588866

ABSTRACT:
A thin film capacitor composed of a hybrid dielectric thin film that is sandwiched by a pair of electrodes. The hybrid dielectric thin film is obtained by complexing or accumulating first and second regions. The first region is derived from an ion plating source and the second region is derived from another ion plating source containing an auxiliary material to be coupled with the first region, both being obtained through an ion plating process. The use of the auxiliary material ensures a pinhole-free hybrid dielectric thin film.

REFERENCES:
patent: 3609482 (1971-09-01), Edelman et al.
patent: 3665269 (1972-05-01), Wright et al.
patent: 3699409 (1972-10-01), Feuersanger et al.
patent: 4406765 (1983-09-01), Higashi et al.
patent: 5128173 (1992-07-01), Kugan
"Hybrid Films Formed from Hexamethyldisiloxane and SiO by Plasma Process", Kashiwagi et al, Japanese Journal of Applied Physics, vol. 30, No. 8, Aug., 1991, pp. 1803-1807.

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