Thin film bulk acoustic resonator, method for producing the...

Details Thin film bulk acoustic resonator, method for producing the... Thin film bulk acoustic resonator, method for producing the...

2007-06-12

2007-06-12

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C333S191000

Reexamination Certificate

active

10935160

ABSTRACT:
A thin film bulk acoustic resonator includes a piezoelectric film, and a pair of electrodes between which the piezoelectric film is interposed. The piezoelectric film includes an outer region extending outwards from at least a portion of the periphery of a resonator portion composed of the pair of electrodes and the piezoelectric film. The outer region includes, in at least a portion thereof, an acoustic damping region for damping acoustic waves.

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Kim, Sang-Hee et al., AIN-based film bulk acoustic resonator devices with W/SiO2 multilayers reflector for rf bandpass filter application, American Vacuum Society, Jul. 2001.

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