Thin film bar resistor

Electrical resistors – With base extending along resistance element – Resistance element coated on base

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Details

338195, 338328, 338314, 338323, 219543, H01C 1012

Patent

active

044853700

ABSTRACT:
A thin film bar resistor comprises: an insulative substrate, a pair of conductive thin film resistor terminals spaced apart on the substrate, an approximately square thin film resistance body disposed on the substrate between the terminals to be separated from them by guard margins, the body consisting of lower and upper layers of unanodized and anodized tantalum nitride, thin film regions of unanodized tantalum nitride in the guard margins to connect such body to the terminals, and thin film conductive leads connected to the terminals. The resistance of the resistor is lowered by configuring the leads to be of "L" shape near the terminal so as to define rectangular areas on the substrate bounded by the arms of each "L" and by portions of the body on transversely opposite sides of, and at longitudinally opposite end of the body, and by having supplemental thin film regions in such areas of unanodized tantalum nitride, these supplemental regions constituting electrical bridges between the "L" shaped parts of the leads and such body portions so as to provide current shunts around the terminals and guard margin regions of the resistor. The remaining side edges of the resistor body are recessed slightly inward from the otherwise square outline to allow for error in registration of the anodization mask. The anodization mask is used to apply semi-liquid electrolyte which is used to anodically trim the value of the resistance.

REFERENCES:
patent: 3405382 (1968-10-01), Wright
patent: 3460026 (1969-08-01), Dow et al.
patent: 3473146 (1969-10-01), Mulligan
patent: 4079349 (1978-03-01), Dorfeld
Thin Film Technology, Berry et al., D. Van Nostrand and Co., 1968.

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