Thin film addressed electrostatic light valve

Details Thin film addressed electrostatic light valve Thin film addressed electrostatic light valve

1995-08-24

1997-11-11

Anderson, Bruce

Optical: systems and elements

Optical modulator

Light wave temporal modulation

G02B 2600

Patent

active

056870191

ABSTRACT:
A plurality of first electrodes (18) are affixed to an insulating substrate (12). Overlapping each first electrode (18) is a respective reflective conductor (20). Each reflective conductor (20) is affixed to the substrate (12). Each first electrode (18) is electrically connected to a respective thin film transistor (30) by a feedthrough means (32). Each thin film transistor (30) is formed on the substrate (12). Applied between each first electrode (18) and the respective reflective conductor (20) is a respective potential difference. Varying each respective potential difference varies a separation distance (86) between the electrode (18) and the respective reflective conductor (20) thereby modulating an electromagnetic wavefront incident thereon.

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Engle, Craig D., An Enhanced Electrostatic Shutter Mosaic Modulator, ser. nr. 07/955,058, filing date Oct. 01, 1992.
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Paul K, Weimer, Chapter 9, Thin Film Transistors, Field Effect Transistors Physic Technology and Applications, edited by Wallmark and Johnson, Prentice-Hall Sep. 1971.
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P. G. LeComber, Present and Future Applications of Amorphous Silicon and its Alloys, Journal of Non-Crystalline Solids 115.

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