Thin film actuated mirror including a seeding member and an elec

Details Thin film actuated mirror including a seeding member and an elec Thin film actuated mirror including a seeding member and an elec

1998-06-30

2000-03-28

Epps, Georgia

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359224, G02B 2600, G02B 2608

Patent

active

060439254

ABSTRACT:
An array of thin film actuated mirrors includes: an active matrix including a substrate, an array of connecting terminals; and an array of actuating structures, each of the actuating structures including an upper electrode functioning as a mirror as well as a common bias electrode, an electrodisplacive member made of a piezoelectric material, a seeding member made of a material having the same crystal structure and growth direction as that of the piezoelectric material constituting the electrodisplacive member, a lower electrode functioning as a signal electrode, an elastic member and a via contact.

REFERENCES:
patent: 5508953 (1996-04-01), Fukuda et al.
patent: 5608569 (1997-03-01), Kim
patent: 5754330 (1998-05-01), Nam

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