Thin film actuated mirror array incorporating therein temperatur

Details Thin film actuated mirror array incorporating therein temperatur Thin film actuated mirror array incorporating therein temperatur

1996-03-29

1997-12-09

Nelms, David C.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359224, 359850, 359900, 437229, G02B 2600

Patent

active

056966202

ABSTRACT:
An array of M.times.N thin film actuated mirrors includes an active matrix; an array of M.times.N supporting members; and an array of M.times.N actuating structures, each of the actuating structures being provided with an actuating and a light reflecting portions and including a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member, an insulating member, a temperature compensating member and a conduit. Furthermore, the method for the manufacture of the array includes the steps of: providing an active matrix; depositing a thin film sacrificial layer; creating an array of empty slots; forming a supporting member; depositing a temperature compensating layer; removing selectively the temperature compensating layer; depositing an elastic layer; forming a conduit; depositing a second thin film and a thin film electrodisplacive layers; patterning the thin film electrodisplacive and the second thin film layers; depositing a first thin film layer; removing selectively the first thin film layer; forming an insulating member; patterning the first thin film, the elastic and the temperature compensating layers; and removing the thin film sacrificial layer thereby forming the array of M.times.N thin film actuated mirrors.

REFERENCES:
patent: 5608569 (1997-03-01), Kim
patent: 5610773 (1997-03-01), Min

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