Optical: systems and elements – Optical modulator – Light wave temporal modulation
Patent
1997-09-30
1999-03-23
Epps, Georgia
Optical: systems and elements
Optical modulator
Light wave temporal modulation
359224, 359295, 359318, 359846, G02B 2600, G02B 2608
Patent
active
058868119
ABSTRACT:
Thin film AMA has a substrate having electrical wiring and a connecting terminal, an actuator formed on the substrate, a supporting element formed between the substrate and the actuator for supporting the actuator, a reflecting member formed on the actuator, and a plurality of posts formed between the actuator and the reflecting member for supporting the reflecting member. The reflecting member is supported by a first post formed on the actuator and by a second post and a third post correspondingly formed on an actuator adjacent to the actuator. So, a deflection or tilting downward of the reflecting member can be prevented so that tilting angle of the reflecting members can be made uniform. Further, as the length of the reflecting member between the first post and the second post, or between the first post and the third post is shorter, the tilting angle of the reflecting member is bigger.
REFERENCES:
patent: 4954789 (1990-09-01), Sampsell
patent: 5126836 (1992-06-01), Um
patent: 5469302 (1995-11-01), Lim
patent: 5604623 (1997-02-01), Ji et al.
patent: 5610773 (1997-03-01), Min
Burke Margaret
Daewoo Electronics Co. Ltd.
Epps Georgia
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