Thin film actuated mirror array in an optical projection system

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With reflector – opaque mask – or optical element integral...

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257 99, 257432, 257433, 358 60, 358 62, 358233, 359291, 359295, 359850, H01L 3300

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active

058775170

ABSTRACT:
Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, a supporting element formed on the substrate, an actuator formed on the supporting element, and a reflecting member formed on the actuator. The actuator has a maximum length in order to have a large tilting angle, so the reflecting member installed on the actuator has a large tilting angle. Hence, the light efficiency of the light reflected by the reflecting member increases and the contrast of the picture projected onto a screen also increases. As a result, the quality of the picture is enhanced. Furthermore, the distance between a light source and the screen is wider because the actuator has the large tilting angle.

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patent: 5663830 (1997-09-01), Ji et al.
patent: 5754330 (1998-05-01), Nam
patent: 5754331 (1998-05-01), Min

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