Thin-film actuated mirror array and method for the manufacture t

Details Thin-film actuated mirror array and method for the manufacture t Thin-film actuated mirror array and method for the manufacture t

1997-05-19

1998-05-19

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, 359224, 359846, 310328, G02B 2600

Patent

active

057543313

ABSTRACT:
An inventive array of M.times.N thin film actuated mirrors includes an active matrix and an array of M.times.N actuating structures. Each of the actuating structures includes an upper thin film electrode, a thin film electrodisplacive member, a lower thin film electrode, an elastic member and a conduit. In the array, since the upper thin film electrode is electrically connected individually to the active matrix through the conduit in each of the actuated mirrors, if one thereof becomes inoperable for any reason, e.g., short-circuit due to the scratch in the upper thin film electrode, other thin film actuated mirrors in the same row or column in the array 200 are not affected.

REFERENCES:
patent: 5581393 (1996-12-01), Min
patent: 5610773 (1997-03-01), Min
patent: 5627673 (1997-05-01), Min
patent: 5636051 (1997-06-01), Lim

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