Thin film actuated mirror array and method for manufacturing the

Details Thin film actuated mirror array and method for manufacturing the Thin film actuated mirror array and method for manufacturing the

1998-06-29

2000-04-18

Epps, Georgia

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, 359298, 359318, G02B 2608

Patent

active

060522178

ABSTRACT:
Thin film AMA and method for manufacturing the thin film AMA are disclosed. The thin film AMA has an active matrix, a supporting member, actuating parts, a reflecting member, and a flatness enhancing member. The flatness enhancing member such as the stress balancing layer or the stiffening member is formed beneath the reflecting member in order to enhance the flatness of the reflecting member without a bending of the reflecting member. Therefore, the reflecting member can have the level surface by the flatness enhancing member though the deformation stress such as residual stress is generated in the reflecting member during forming the reflecting member, so the light efficiency is enhanced and the quality of the picture projected onto the screen is increased.

REFERENCES:
patent: 5469302 (1995-11-01), Lim
patent: 5663830 (1997-09-01), Ji et al.
patent: 5691836 (1997-11-01), Clark
patent: 5757539 (1998-05-01), Min
patent: 5815305 (1998-10-01), Min et al.
patent: 5835256 (1998-11-01), Huibers

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