Thin film actuated mirror array

Details Thin film actuated mirror array Thin film actuated mirror array

1998-06-30

2000-09-05

Epps, Georgia

Optical: systems and elements

Optical modulator

Light wave temporal modulation

G02B 2600

Patent

active

061151726

ABSTRACT:
Thin film AMA is disclosed. The thin film AMA has an active matrix, a supporting member, an actuator, and a reflecting member. The actuator has a bottom electrode, two active layers, and two top electrodes. The actuator has maximum tilting angle due to margins formed between the bottom electrode and the two active layers or between the two active layers and the two top electrodes. Also, the tilting angle of the actuator is increased because the layers of the actuator respectively have proper thicknesses. Therefore, the quality of the picture projected onto a screen is enhanced and the arrangement of the AMA may be more easy.

REFERENCES:
patent: 5469302 (1995-11-01), Lim
patent: 5757539 (1998-05-01), Min

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