Etching a substrate: processes – Forming or treating optical article
Patent
1995-06-07
1996-12-31
Powell, William
Etching a substrate: processes
Forming or treating optical article
216 97, B44C 122
Patent
active
055890849
ABSTRACT:
A thin film actuated mirror for an actuated mirror array includes a pedestal and at least piezoelectric structure cantilevered from the pedestal. The piezoelectric structure includes a layer of piezoelectric material having two opposing surfaces. Each of two metal electrodes are mounted on a respective one of the opposing surfaces of the piezoelectric material layer. An electrical signal is applied across the piezoelectric material, between the electrodes, causing deformation of the piezoelectric material. The thin film actuated mirror further includes a mirror surface interconnected to the piezoelectric material layer such that the mirror surface deforms in response to the deformation of the piezoelectric material layer.
REFERENCES:
patent: 4885055 (1989-12-01), Woodbury et al.
patent: 5364742 (1994-11-01), Fan et al.
Ji Jeong B.
Um Gregory
Aura Systems, Inc.
Cascio Anthony T.
Daewoo Electronics Co. Ltd.
Merkadeau Lisa A.
Powell William
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