Thin coat temperature compensated resistance oxide gas sensor

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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427102, 427103, 427423, B05D 108

Patent

active

042998590

ABSTRACT:
A temperature compensated resistive oxygen sensor and a method of manufacturing the same. On the surface of the sensor there are disposed in spaced relation three electrodes. One electrode and a portion of a second electrode is completely covered by a layer of a resistive material which is sensitive to changes in temperature. Another layer of resistive material which is sensitive to both changes in temperature and changes in the partial pressure of oxygen in the gas to which it is exposed covers the first resistive layer as well as the third electrode and the remaining portion of the second electrode. It is also a feature of the present invention that these layers are applied by shielding part of the surface of the sensor and applying the first layer by a hot thin-layer technique and by removing the shield and applying the second layer also by a hot thin-layer technique.

REFERENCES:
patent: 3197335 (1965-07-01), Leszynski
patent: 3872419 (1975-03-01), Groves et al.
patent: 3901067 (1975-08-01), Boardman et al.
patent: 4099922 (1978-07-01), Yasuda et al.
patent: 4147513 (1979-04-01), Bienkowski et al.
patent: 4151503 (1979-04-01), Cermak et al.
patent: 4198443 (1980-04-01), Pitha

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