Thin coat temperature compensated resistance oxide gas sensor

Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing gas sample

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73 23, 338 34, G01N 2712

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active

042345421

ABSTRACT:
A temperature compensated resistive oxygen sensor and a method of manufacturing the same. On the surface of the sensor there are disposed in spaced relation three electrodes. One electrode and a portion of a second electrode is completely covered by a layer of a resistive material which is sensitive to changes in temperature. Another layer of resistive material which is sensitive to both changes in temperature and changes in the partial pressure of oxygen in the gas to which it is exposed covers the first resistive layer as well as the third electrode and the remaining portion of the second electrode. It is also a feature of the present invention that these layers are applied by shielding part of the surface of the sensor and applying the first layer by a hot thin-layer technique and by removing the shield and applying the second layer also by a hot thin-layer technique.

REFERENCES:
patent: 3901067 (1975-08-01), Boardman, Jr. et al.
patent: 4099922 (1978-07-01), Yasuda et al.
patent: 4147513 (1979-04-01), Bienkowski et al.
patent: 4151503 (1979-04-01), Cermak et al.

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