Thin carbon overcoat and method of its making

Details Thin carbon overcoat and method of its making Thin carbon overcoat and method of its making

1993-10-08

1996-10-22

Kiliman, Leszek

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

428336, 428408, 428694T, 428694TR, 428694TP, 428694TC, 428694TZ, 428694TF, 428698, 428900, 2041922, G11B 566, B32B 516, B32B 900, C23C 1400

Patent

active

055675123

ABSTRACT:
A thin film magnetic disc having a carbon overcoat which is characterized by (i) a surface density of nitrogen atoms between 3-8.times.10.sup.16 atoms/cm.sup.2, as determined by Rutherford backscatter spectroscopy, and (ii) an erosion rate, as measured by rate of erosion of the overcoat by an Al.sub.2 O.sub.3 particle tape placed in contact with the medium, that is several times less than that of a carbon overcoat having the same thickness, but formed by sputtering under a pure argon atmosphere. The overcoat has a preferred thickness between 80-150 .ANG.. Also disclosed is a method of producing a thin, wear-resistant carbon overcoat.

REFERENCES:
patent: 4717622 (1988-01-01), Kurokawa
patent: 4767517 (1988-08-01), Hiroki
patent: 4780354 (1988-10-01), Nakayama
patent: 4804590 (1989-02-01), Nakamura
patent: 4932331 (1990-06-01), Kurihara
patent: 5045165 (1991-09-01), Yamashita
patent: 5227211 (1993-07-01), Eltoukhy
patent: 5260409 (1993-11-01), Schmidt
Marchon, B., et al., "Raman and resistivity investigations of carbon overcoats of thin-film media: Correlations with tribological properties," J. Appl. Phys. 69(8): 5748-5750 (1991).
Marchon, B., et al., "Structure and Mechanical Properties of Hydrogenated Carbon Films Prepared by Magnetron Sputtering," IEEE Trans. Mag. 27(6): 5160-5162 (1991).

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