Thin alignment layers for liquid crystal displays

Details Thin alignment layers for liquid crystal displays Thin alignment layers for liquid crystal displays

2011-06-07

2011-06-07

Meeks, Timothy H (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

C427S058000

Reexamination Certificate

active

07955648

ABSTRACT:
A method to form alignment layers on a substrate of an LCD is disclosed. The substrate is placed in a vacuum chamber and undergoes a purging process. The purging process heats the substrates and removes water vapor from the vacuum chamber. Specifically, The vacuum chamber is evacuated to a low pressure and refilled with a preheated inert gas. Evacuation of the vacuum chamber and refilling of the vacuum chamber is repeated several times. The alignment layer is then deposited using chemical vapor deposition.

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