Thin adhesive sheet for working semiconductor wafers

Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Adhesive outermost layer

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428345, 428355, B32B 712

Patent

active

056373953

ABSTRACT:
A thin adhesive sheet for working semiconductor wafers is described, comprising a light-permeable support and a pressure-sensitive adhesive layer on the support, wherein the adhesive layer is a composition comprising 100 parts by weight of a base polymer, from 1 to 100 parts by weight of a low molecular weight compound containing at least two photopolymerizable carbon-carbon double bonds in the molecule, and from 0.1 to 5 parts by weight of a photopolymerization initiator. This adhesive sheet is firmly bonded to a semiconductor wafer during the wafer cutting process whereafter and during the wafer polishing process. After irradiation, the adhesive force of the adhesive sheet is markedly reduced. As a result, the pick-up operation can be carried out easily. This adhesive sheet is useful in working semiconductor wafers.

REFERENCES:
patent: 3983297 (1976-09-01), Ono et al.
patent: 4181752 (1980-01-01), Martens et al.
patent: 4286047 (1981-08-01), Bennett et al.
patent: 4311759 (1982-01-01), Glennon
patent: 4312916 (1982-01-01), Kakumaru et al.
patent: 4379201 (1983-04-01), Heilmann et al.
patent: 4522870 (1985-06-01), Esmay
Patent Abstract of Japan, vol. 5, No. 179 (Nov. 17, 1981).
English Translation of Claim of JP-B2-58-50164.
English Translation of Claim of JP-A-59-21038.

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