Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1996-08-09
1998-09-01
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310320, 310361, 333193, H01L 4108
Patent
active
058014764
ABSTRACT:
The invention is directed to resonators and more particularly to an MMIC-compatible resonator which can be fabricated on an MMIC chip using MMIC processing techniques. The MMIC-compatible resonator has a substrate approximately 100 microns thick made of semi-insulating GaAs and/or AlGaAs. The substrate flanks an air via on which is fabricated a thin film piezoelectric semi-insulating GaAs film, comprising the piezoelectrically active element. The piezoelectrically active element is flanked either laterally or from the top to bottom thereof by a pair of electrodes which serve to excite the thickness shear or thickness extensional mode of the thin film piezoelectrically active element. There are a number of III-V and II-VI binary compounds and ternary, and other piezoelectric semiconductor alloys, which can be used for the purposes of the invention. The thin film measures approximately 5 microns or less in thickness and is thereof.
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patent: 5185589 (1993-02-01), Krishnaswamy et al.
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Temperature Compensated High Coupling and High Quality Factor ZnO/SiO.sub.2 ulk Wave Resonators on High Resistance Substrates, by Shiosaki et al, IEEE Ultrasonics Symposium, 1984, pp. 405-410.
Acoustic Bulk Wave Composite Resonators, by Larkin et al, Appl. Phys. Lett 38(3), Feb. 1, 1981, pp. 125-127.
Ballato Arthur
Cooke Paul W.
Cui Hong-Liang
Kosinski John A.
Sturzebecher Dana J.
Budd Mark O.
O'Meara John M.
The United States of America as represented by the Secretary of
Zelenka Michael
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