Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Distributive type parameters
Reexamination Certificate
2006-11-14
2006-11-14
Lee, Diane (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Distributive type parameters
C324S635000, C324S644000
Reexamination Certificate
active
07135869
ABSTRACT:
Film thickness measurement systems and methods are provided that utilize a signal generator having a Gunnplexer design and a resonant frequency detector to correlate the shift in resonant frequency experienced by a resonant cavity having one face abutting a test object. The shift is resonant frequency is determinative of a linear or near linear correlation between film thickness and the resonant frequency shift.
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Champion Corbin
Olsen Robert G.
Sergoyan Edward G.
Baker & Hostetler LLP
Kramskaya Marina
Lee Diane
The Boeing Company
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