Thickness measurement method and apparatus

Details Thickness measurement method and apparatus Thickness measurement method and apparatus

2006-02-21

2006-02-21

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07002693

ABSTRACT:
A monochromatic light is cast on a thin layer, and the intensity of the reflected light which is an interference light of the lights reflected by the front surface and back surface of the layer. A spectrum (a measured spectrum) is obtained from the measured intensity by scanning the wavenumber of the monochromatic light. On the other hand, a constructed spectrum is created based on an assumed thickness using a predetermined function. Then an error between the measured spectrum and the constructed spectrum is calculated. The value of the error is plotted against the assumed thickness, and the point at which the error is minimum is detected. The assumed thickness at the error-minimum point is determined as the thickness of the layer.

REFERENCES:
patent: 5293214 (1994-03-01), Ledger
patent: 6753972 (2004-06-01), Hirose et al.

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