Stock material or miscellaneous articles – Structurally defined web or sheet – Including aperture
Reexamination Certificate
2007-09-11
2007-09-11
Nordmeyer, Patricia L. (Department: 1772)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including aperture
C428S472200, C428S614000, C428S629000, C430S312000, C430S314000, C430S318000, C205S198000, C205S212000
Reexamination Certificate
active
10303653
ABSTRACT:
The presently disclosed invention provides for the fabrication of porous anodic alumina (PAA) films on a wide variety of substrates. The substrate comprises a wafer layer and may further include an adhesion layer deposited on the wafer layer. An anodic alumina template is formed on the substrate. When a rigid substrate such as Si is used, the resulting anodic alumina film is more tractable, easily grown on extensive areas in a uniform manner, and manipulated without danger of cracking. The substrate can be manipulated to obtain free-standing alumina templates of high optical quality and substantially flat surfaces PAA films can also be grown this way on patterned and non-planar surfaces. Furthermore, under certain conditions the resulting PAA is missing the barrier layer (partially or completely) and the bottom of the pores can be readily accessed electrically. The resultant film can be used as a template for forming an array of nanowires wherein the nanowires are deposited electrochemically into the pores of the template. By patterning the electrically conducting adhesion layer, pores in different areas of the template can be addressed independently, and can be filled electrochemically by different materials. Single-stage and multi-stage nanowire-based thermoelectric devices, consisting of both n-type and p-type nanowires, can be assembled on a silicon substrate by this method.
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Akinwande Akintunde I.
Dresselhaus Mildred S.
Herz Paul R.
Lin Yu-Ming
Rabin Oded
Daly, Crowley & Mofford & Durkee, LLP
Massachusetts Institute of Technology
Nordmeyer Patricia L.
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