Coating apparatus – Immersion or work-confined pool type – Work-confined pool
Patent
1990-03-20
1992-01-14
Housel, James C.
Coating apparatus
Immersion or work-confined pool type
Work-confined pool
118410, 118421, 118428, 118503, 118697, B05C 500, B05C 1300
Patent
active
050800361
ABSTRACT:
A thick film drawing apparatus includes a substrate holding member (50) for holding a substrate (a), moving coils (60) for holding the substrate holding member (50), a drawing head (20) having a nozzle (30) and a stylus (33) for emitting pastes for drawing on a surface of the substrate (a) moving thereon and pushing the substrate (a) downward, respectively, wherein in the drawing process the drawing head (20) is locked of up/down motions and the substrate holding member (50) is raised/lowered at substantially constant weaker force by the moving coils (60), and thereby a relative-moving response of the up/down directions of the nozzle (30) is improved and a contact force of the stylus (33) on the substrate (a) is kept under a predetermined constant value, therefore a thickness of thick film line (c) is kept uniform and circuit patterns are prevented from being flawed.
REFERENCES:
patent: 4592303 (1986-06-01), Wilbur, Jr.
patent: 4605569 (1986-08-01), Shimada et al.
patent: 4692351 (1987-09-01), Maeda et al.
patent: 4743465 (1988-05-01), Saeki et al.
patent: 4770120 (1988-09-01), Komatsu
Kabeshita Akira
Mori Kazuhiro
Housel James C.
Matsushita Electric - Industrial Co., Ltd.
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