Thermostable coating materials

Details Thermostable coating materials Thermostable coating materials

1995-06-07

1997-06-24

Glass, Margaret W.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

528 26, C08G 7726

Patent

active

056418388

ABSTRACT:
Novel intermediate compounds capable of being applied to a semiconductor precursor by spin-on methods which exhibit good planarity and gap-fill characteristics, the cured composites of which are capable of withstanding temperatures in excess of 500.degree. C. The disclosure further encompasses a process for fabricating semiconductor devices utilizing the intermediate compounds and its composite.

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patent: 4499252 (1985-02-01), Igarashi et al.
patent: 4758476 (1988-07-01), Sekine et al.
patent: 5002831 (1991-03-01), Plueddemann
patent: 5021585 (1991-06-01), Dougherty et al.
patent: 5036145 (1991-07-01), Echterling et al.
Hiemenz, Paul. "Polymer Chemistry", p. 335 1984.
Babu, G.N. "Silicon-Modified Polyimides: Synthesis and Properties". Proceedings of Soc. of Plastics Engineers 1982.

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