Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2005-12-06
2005-12-06
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
06971266
ABSTRACT:
Cavities are formed so as to extend from a rear surface side of a base material to a protective film, an electrically-insulating film is formed on a rear surface of the base material, wall surfaces of the cavities, and exposed surfaces of the protective film, and a heating resistor portion and a fluid temperature resistance thermometer portion are formed on portions of the electrically-insulating film on the exposed surfaces of the protective film inside the cavities. In addition, leader patterns are formed on the electrically-insulating film so as to extend from end portions of the heating resistor portion and the fluid temperature resistance thermometer portion along the wall surfaces of the cavities onto the rear surface of the base material.
REFERENCES:
patent: 5056362 (1991-10-01), Ang et al.
patent: 5633552 (1997-05-01), Lee et al.
patent: 6015722 (2000-01-01), Banks et al.
patent: 6032527 (2000-03-01), Genova et al.
patent: 6562404 (2003-05-01), Folta et al.
patent: 2002-357467 (2002-12-01), None
Mack Corey D.
Mitsubishi Denki & Kabushiki Kaisha
Patel Harshad
Sughrue & Mion, PLLC
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