Thermopile infrared sensor array

Details Thermopile infrared sensor array Thermopile infrared sensor array

2006-05-16

2010-11-30

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S332000, C250S338400, C257SE27130, C257SE27001, C257SE27122, C257S461000, C257S465000, C257S466000

Reexamination Certificate

active

07842922

ABSTRACT:
A thermopile infrared sensor array, comprises a sensor chip with a number of thermopile sensor elements, made from a semiconductor substrate and corresponding electronic components. The sensor chip is mounted on a support circuit board and enclosed by a cap in which a lens is arranged. The aim is the production of a monolithic infrared sensor array with a high thermal resolution capacity with a small chip size and which may be economically produced. The aim is achieved by arranging a thin membrane made from non-conducting material on the semiconductor substrate of the sensor chip on which the thermopile sensor elements are located in an array. Under each thermopile sensor element, the back side of the membrane is uncovered in a honeycomb pattern by etching and the electronic components are arranged in the boundary region of the sensor chip. An individual pre-amplifier with a subsequent low-pass filter may be provided for each column and each row of sensor elements.

REFERENCES:
patent: 5056929 (1991-10-01), Watanabe et al.
patent: 5583058 (1996-12-01), Utsumi et al.
patent: 5789797 (1998-08-01), Ikuta et al.
patent: 5808350 (1998-09-01), Jack et al.
patent: 5962854 (1999-10-01), Endo
patent: 6294787 (2001-09-01), Schieferdecker et al.
patent: 6372656 (2002-04-01), Laermer et al.
patent: 6504153 (2003-01-01), Shigenaka et al.
patent: 6649913 (2003-11-01), Kennedy et al.
patent: 6710348 (2004-03-01), Rothley et al.
patent: 2001/0035559 (2001-11-01), Ando et al.
patent: 2004/0079888 (2004-04-01), Inamura
patent: 2007/0187602 (2007-08-01), Wennmacher et al.
patent: 19923606 (2000-01-01), None
patent: 103 21639 (2004-02-01), None
patent: 10322860 (2004-12-01), None
patent: 1045233 (2000-10-01), None
“Operational amplifier low pass filter circuit”, Retrieved from the internet <http://www.radio-electronics.com/info/circuits/opamp—low—pass—filter/op—amp—lowpassfilter.php>; Retrieved on [Jul. 22, 2010]; published Oct. 29, 2005.
Baltes et al. “Micromachines Thermally Based CMOS Microsensors” Proceedings of the IEEE, vol. 86, No. 8, Aug. 1998.
Eminoglu et al. “A Low-cost 64x64 Uncooled Infrared Detector Array in Standard CMOS” Transducers'03, The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, Jun. 8-12, 2008, pp. 316-319.
Jansson et al. “FOA/DSTO Uncooled IRFPA Development” Part of the SPIE Conference on Infrared Technology and Applications XXV, Orlando, FL, Apr. 1999. SPIE vol. 3698, pp. 264-275.
Rogalski, A. “Optical Detectors for Focal Plane Arrays” Opto-Electronics Review 12(2), 221-245, (2004).
Oliver et al. “A 1024-Element Bulk-Micromachined Thermopile Infared Imaging Array” Sensors and Actuators 73 (1999), 222-231.
International Search Report for PCT/DE2006/000841 dated Aug. 7, 2006.
Jansson C. et al; “FOA/DSTO uncooled IRFPA development” Infrared Technology and Applications XXV, Apr. 5-9, 1999, Orlando, FL. Proceedings of the SPIE-The International Society for Optical Engineering SPIE-Int. Soc. Opt. Eng USA I, XP002393166.
Rogalski A: “Optical detectors for focal plane arrays” Opto-electronics Review Assoc. Polish Electrical Engineers Poland, Bd. 12, Nr. 2, 2004, Seiten 221-245, XP002393167.
Oliver A D et al: A 1024-element bulk-micromachined thermopile infrared imaging array Sensors and Actuators A, Elsevier Sequoia S.A., Lausanne, CH, Bd. 73, Nr. 3, 30. Mar. 30, 1999. XP004167985.
Jansson et al. “FOA/DSTO Uncooled IRFPA Development” Part of the SPIE Conference on Infrared Technology and Applications XXV, Orlando, FL, Apr. 1999. SPIE vol. 3698, pp. 264-275.
Rogalski, A. “Optical Detectors for Focal Plane Arrays” Opto-Electronics Review 12(2), 221-245.

Affiliated with

Also associated with

Rating

Thermopile infrared sensor array does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermopile infrared sensor array, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermopile infrared sensor array will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4251765