Thermopile-based gas sensor

Details Thermopile-based gas sensor Thermopile-based gas sensor

2005-03-31

2008-03-04

Sines, Brian (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

C422S050000, C422S088000, C422S095000, C374S010000, C374S011000, C374S012000, C374S013000, C374S029000, C374S031000, C374S100000, C436S043000, C436S147000, C436S149000, C436S155000

Reexamination Certificate

active

07338640

ABSTRACT:
A method of manufacturing a sensor is provided. The method includes disposing a sacrificial layer on a substrate, disposing a low-thermal-conductivity layer on the sacrificial layer, and disposing a first set of conductive arms and a second set of conductive arms on the low-thermal-conductivity layer to form a plurality of thermal junctions. The plurality of thermal junctions is adapted to form a plurality of hot junctions and a plurality of cold junctions when subjected to a difference in temperature. The method also includes removing the sacrificial layer and a portion of the low-thermal-conductivity layer to form a cavity therein. The cavity is configured to provide insulation for the plurality of hot junctions. A thermopile sensor is also provided, and a calorimetric gas sensor implementing the thermopile sensor is provided.

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Smith et al., “Determining the Effects of Vapor Sorption in Polymers with the Quartz Crystal Microbalance/Heat Conduction Calorimeter,” Journal of Polymer Science: Part B: Polymer Physics, vol. 42, pp. 3893-3906, Wiley Periodicals, Inc. (2004).

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