Thermophoretic protection of reticles

Details Thermophoretic protection of reticles Thermophoretic protection of reticles

2007-01-09

2007-01-09

Yu, Mickey (Department: 3728)

Special receptacle or package

With specified material for container or content

For content inhibitor or stabilizer

C206S454000, C206S701000, C062S457100

Reexamination Certificate

active

10631170

ABSTRACT:
A thermophoretic source may be contained within the packaging of a reticle during transport or otherwise to protect the reticle from particle contamination. For example, in advanced lithography technologies, very small particles may be thermophoretically attracted away from the reticle during transport so that cleaning on arrival may not be necessary in some cases.

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patent: 5979173 (1999-11-01), Tyree
patent: 6153044 (2000-11-01), Klebanoff et al.
patent: 6247599 (2001-06-01), Cheng et al.
patent: 6543617 (2003-04-01), Angelopoulos et al.
patent: 2002/0014158 (2002-02-01), Page et al.

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