Thermoelectric sensor

Details Thermoelectric sensor Thermoelectric sensor

1998-02-25

2000-03-21

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

2503384, 250352, 7320426, 136225, G01J 512

Patent

active

060405791

ABSTRACT:
Thermoelectric sensor (12) formed by a membrane (14) including a plurality of thermoelectric elements (20) formed of a plurality of thermoelectric couples and forming a plurality of elementary cells. Each elementary cell is thermally insulated from adjacent elementary cells by metal wires (22, 23), preferably gold wires, arranged on the front face (25) of the membrane (14), more particularly, on an upper passivation layer (30). The metal wires (22 and 23) are thermally connected to a substrate (16) supporting said membrane. The two wires separating two adjacent thermoelectric elements (20) are separated from each other by an intermediate low thermal conduction region (28).

REFERENCES:
patent: 4465894 (1984-08-01), Reyes
patent: 5721430 (1998-02-01), Wong
Sensors and Actuators A, vol. A48, No. 1, May 1, 1995, pp. 47-54, XP000521309 Baer W G et al: "A 32-Element Micromachined Thermal Imager with On-Chip Multiplexing".
1995 IEEE Tencon, IEEE Region Ten International Conference on Microelectronics and VLSI, Hong Kong, Nov. 6-10, 1995, Nov. 6, 1995 Institute of Electrical and Electronics Engineers, pp. 198-201, XP000585776 Schneeberger N et al: "Optimized CMOS Infrared Detector Microsystems".

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