Thermoelectric microprobe

Details Thermoelectric microprobe Thermoelectric microprobe

1997-08-29

1999-10-19

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

136228, 374142, 374120, G01K 1300, G01N 2500, H01L 3502

Patent

active

059692383

ABSTRACT:
A microprobe for thermoelectric microscopic measurements comprises a probe body (11), which consists of a doped or intrinsically conductive semiconductor material and has at least one thermoelectric contact surface (19). The probe body (11) can carry a metal or semiconductor layer (17), which is separated from the probe body (11) by an insulating layer (16) except in the area of the thermoelectric contact surface (19). A process for the production of a microprobe for thermoelectric microscopic measurements is also given.

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patent: 5581083 (1996-12-01), Majumdar et al.
M. Stahelin et al., "Temperature profile of fiber tips used in scanning n-field optical microscopy", Appl. Phys. Lett. 68(19), pp. 2603-2605 (May, 1996).
A. Majumdar et al., "Thermal imaging by atomic force microscopy using thermocouple cantilever probes", Rev. Sci. Instrum. 66(6), pp. 3584-3592 (Jun., 1995).
O. Nakabeppu et al., "Scanning thermal imaging microscopy using composite cantilever probes", Appl. Phys. Lett. 66(6), pp. 694-696 (Feb., 1995).
C.C. Williams et al., "Scanning thermal profiler", Appl. Phys. Lett. 49(23), pp. 1587-1589 (Dec., 1986).

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