Thermo-optical waveguide switch

Details Thermo-optical waveguide switch Thermo-optical waveguide switch

2005-01-25

2005-01-25

Palmer, Phan T. H. (Department: 2874)

Optical waveguides

With optical coupler

Switch

C014S046000, C014S046000, C014S046000, C065S386000

Reexamination Certificate

active

06847750

ABSTRACT:
The invention relates to a thermo-optical waveguide switch which is located on a substrate. Said switch comprises a glass layer, through which a waveguide extends. A hollow chamber which lies beneath the waveguide thermally decouples the latter from the substrate. At least two supports are located in the hollow chamber to provide mechanical stability. One production method for obtaining a thermo-optical waveguide switch consists of creating a glass layer with an arrangement of perforations on a substrate. At least one hollow chamber containing at least two supports is formed by isotropically underetching the glass layer. The hollow chamber is subsequently sealed and a waveguide is formed above said hollow chamber. Another production method first creates a waveguide in a glass layer which is formed on a substrate. The glass layer in the vicinity of the waveguide is then removed using a mask and the waveguide is at least partially underetched by an isotropic etching process, thus forming a hollow chamber containing at least two supports below the waveguide.

REFERENCES:
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Patent Abstracts of Japan; Optical Waveguide and its Production, Jan. 19, 1996, Sumitoma Electric Ind. Ltd.
Sugita A. et al., Bridge-suspended Silica-Waveguide Thermo-Optic Phase Shifter and Its Application to Mach-Zehnder Type Optical Switch, Transactions of the Institute of Electronics, Information and Communication Engineers of Japan, Jp., Institute of Electronics and Communic. Engineers of Japan, Tokyo, vol. E73, No. 1, 1990, p. 105-108, XP000103975.
Schneider, W.H., Realization of SIO2-B203-TI02 Waveguides and Reflectors on Si Substrates in : Optical Waveguide Materials, edited by M.M. Broer et al., 1992, vol. 244, p. 337-342.
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Masayuki Okuno et al., Silica-based Thermo-Optic Switches, NTT Review, vol. 7, No. 5, Sep. 1996, p. 57-63.
Tamir Th. (Ed.) Guided-Wave Optoelectronics, Springer-Verlag, 1988, p. 174-184.

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