Thermo-optical device

Details Thermo-optical device Thermo-optical device

2008-01-15

2008-01-15

Malsawma, Lex (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

Reexamination Certificate

active

07319047

ABSTRACT:
A polymer well may be formed over a thermal oxide formed over a semiconductor substrate in one embodiment. The well may include a waveguide and a pair of heaters adjacent the waveguide. Each heater may be mounted on a platform of insulating material to reduce heat loss through the substrate and the thermal oxide, in one embodiment.

REFERENCES:
patent: 2001/0046363 (2001-11-01), Purchase et al.

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