Thermo-mechanically actuated reflective structure

Details Thermo-mechanically actuated reflective structure Thermo-mechanically actuated reflective structure

2006-07-18

2006-07-18

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S238000

Reexamination Certificate

active

07079300

ABSTRACT:
One embodiment of an optical modulator includes a substrate, a reflective structure, and at least three thermally actuated supports that movably support said reflective structure on said substrate.

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patent: 2004/0114259 (2004-06-01), Ishizuya et al.
patent: 2004/0236223 (2004-11-01), Barnes et al.

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