Thermo-mechanical overlay signature tuning for Perkin-Elmer mask

Details Thermo-mechanical overlay signature tuning for Perkin-Elmer mask Thermo-mechanical overlay signature tuning for Perkin-Elmer mask

1983-12-01

1985-09-10

Corbin, John K.

Photocopying

Contact printing

Light boxes

350320, 355 52, 355 30, G02B 510

Patent

active

045402515

ABSTRACT:
Thermoelectric heat pumps are individually located at multiple flexures functioning to support a primary mirror which mirror reflects light from an aluminum mask onto a semiconductor wafer. The heat pumps are selectively energized to apply thermal stresses by heat or cold application at the flexures into the primary mirror suspension to compensate for distortions in the image transfer between the mask and the semiconductor wafer.

REFERENCES:
patent: 4175835 (1979-11-01), Kuhn
patent: 4408874 (1983-10-01), Zinky et al.
patent: 4422725 (1983-12-01), Prewo
John W. Hardy, "Active Optics . . . Light", Proceedings of IEEE, vol. 66, No. 6, 6-1978, pp. 674-684.

Affiliated with

Also associated with

Rating

Thermo-mechanical overlay signature tuning for Perkin-Elmer mask does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermo-mechanical overlay signature tuning for Perkin-Elmer mask, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermo-mechanical overlay signature tuning for Perkin-Elmer mask will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1425293