Thermionic thermal detector and detector array

Details Thermionic thermal detector and detector array Thermionic thermal detector and detector array

1997-10-27

1999-12-14

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

257452, H01L 310328, H01L 3109

Patent

active

060021322

ABSTRACT:
A new kind of thermal detector and thermal imager for infrared radiation. A thermal detector/imager is a device for detecting/imaging in the infrared portion of the electromagnetic spectrum. This produces a video image, where the video brightness is a function of the incident power. The new thermal imager consists of a thermionic thermal detector having: a substrate having a thermal insulating gap; and a reverse biased CoSi.sub.2 diode suspended over the thermal insulating gap of the substrate and which senses temperature of thermionic emission by producing an output signal with a current that changes exponentially with temperature changes. The substrate is a silicon on insulator (SOI) wafer which has said thermal insulating gap on its top surface; an oxide insulator layer that covers the top surface of the thick silicon support layer, including the thermal insulating gap; and support legs placed on the top surface of the oxide insulator layer. The support legs support the reverse biased CoSi.sub.2 diode in place.

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patent: 5796155 (1998-08-01), Shepherd et al.

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