Thermionic-cathode for pre-ionization of an extreme...

Details Thermionic-cathode for pre-ionization of an extreme... Thermionic-cathode for pre-ionization of an extreme...

2005-04-26

2005-04-26

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C313S030000, C313S336000, C430S006000

Reexamination Certificate

active

06885015

ABSTRACT:
A source of soft x-rays in an Extreme Ultraviolet (EUV) lithography system may include a pre-ionization unit to pre-ionize a source material, e.g., a Xenon plasma. The pre-ionization unit may be integrated with a discharge unit, and may use Lanthanum Hexaboride (LaB6) as a thermionic emitter material.

REFERENCES:
patent: 4258283 (1981-03-01), Brunger et al.
patent: 4994706 (1991-02-01), Leung et al.
patent: 6576380 (2003-06-01), Davis et al.

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