Thermally tuned filter having a pre-stressed membrane

Details Thermally tuned filter having a pre-stressed membrane Thermally tuned filter having a pre-stressed membrane

2006-06-13

2006-06-13

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

C359S290000, C359S238000

Reexamination Certificate

active

07061659

ABSTRACT:
A thermally tuned filter having a pre-stressed membrane. The thermally tuned filter includes a handle layer, a dielectric layer positioned proximate to the handle layer, and a device layer positioned proximate to the handle layer. The device layer includes an optical device. A pre-stressed membrane is positioned proximate to the device layer; a tensile prestress of the pre-stressed membrane increases the natural frequency of the thermally tuned filter.

REFERENCES:
patent: 2001/0028494 (2001-10-01), Norwood et al.
patent: 2003/0108306 (2003-06-01), Whitney et al.

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