Thermally tuned filter having a pre-stressed membrane

Optical: systems and elements – Optical modulator

Reexamination Certificate

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C359S290000

Reexamination Certificate

active

07081981

ABSTRACT:
A thermally tuned filter comprising an optical tuning device and a pre-stressed membrane positioned on the optical tuning device. A tensile prestress of the pre-stressed membrane to increase a natural frequency of the thermally tuned filter.

REFERENCES:
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patent: 2003/0108306 (2003-06-01), Whitney et al.
patent: 2003/0231666 (2003-12-01), Daiber et al.
patent: 2005/0105184 (2005-05-01), Ma et al.
Meissner, P. et al., “Micromachined Two-Chip WDM Filters with Stable Half Symmetric Cavity and their system integration,” 2002 Proceedings 52ndElectronic Components and Technology Conference, vol. CONF. 52, May 28, 2002, pp. 34-41.
Chen Jing et al., “Dynamic Characteristics of Novel Single-chip Fabricated Corrugated Diaphragms for Micro-acoustic Devices,” Solid-State and Integrated-Circuit Technology, 2001. Proceedings. IEEE, vol. 2, Oct. 22, 2001, pp. 757-760.
Tarraf, Amer et al., “A novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices,” Proceedings of SPIE, vol. 4945, 2003, pp. 9-20.
PCT/US2005/010772, PCT Int'l Search Report and Written Opinion, Jul. 29, 2005.

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