Thermally stable positive polycarbonate electron beam resists

Details Thermally stable positive polycarbonate electron beam resists Thermally stable positive polycarbonate electron beam resists

1974-09-26

1976-06-01

Newsome, John

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

96 351, 96 362, 96115R, 20415919, 427273, B05D 306

Patent

active

039610993

ABSTRACT:
Electron beam positive resists which are sensitive to electron beam radiation and simultaneously thermally stable are prepared using polycarbonates.

REFERENCES:
patent: 3043802 (1962-07-01), Thomas et al.
patent: 3535137 (1970-10-01), Haller et al.
patent: 3622331 (1971-11-01), Thomas
patent: 3770697 (1973-11-01), Holub et al.
Colebrooke et al. "Chem. Abstr." 81,13810, 7-1974. 443.

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