Thermally stable multilayer mirror for the EUV spectral range

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector

Reexamination Certificate

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C359S586000, C359S589000

Reexamination Certificate

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07986455

ABSTRACT:
A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.

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