Thermally stable multilayer mirror for the EUV spectral range

Details Thermally stable multilayer mirror for the EUV spectral range Thermally stable multilayer mirror for the EUV spectral range

2011-07-26

2011-07-26

Nguyen, Thong (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Multilayer filter or multilayer reflector

C359S586000, C359S589000

Reexamination Certificate

active

07986455

ABSTRACT:
A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.

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