Thermally stable magnetic deflection assembly and method of maki

Details Thermally stable magnetic deflection assembly and method of maki Thermally stable magnetic deflection assembly and method of maki

1990-05-17

1991-04-30

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

2504922, 335213, 335210, H01J 332, H01J 37147, H01J 3730

Patent

active

050121049

ABSTRACT:
A thermally stable magnetic deflection assembly for use in an electron or particle beam machine with several separately potted magnetic coils spaced apart and arranged in a particular vertical position on a central pipe. Non metallic, low coefficient of thermal expansion, highly thermally conductive materials are used throughout and means are provided for maintaining the entire assembly at a desired temperature. Also disclosed is a method of making a thermally stable magnetic deflection assembly.

REFERENCES:
patent: 3916201 (1975-10-01), Herrmann et al.
patent: 4737752 (1988-04-01), Kriz

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