Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Reexamination Certificate
2007-11-06
2007-11-06
Teskin, Fred (Department: 1713)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Polymers from only ethylenic monomers or processes of...
C526S280000, C526S281000, C430S270100, C430S319000, C438S780000
Reexamination Certificate
active
11414347
ABSTRACT:
The present invention provides norbornene-based copolymers for which one monomer is at least selected from a group consisting of norbornene and dicyclopentadiene, and the other from norbornene-based comonomers of Formula 1 shown below:In Formula 1, R1, R2and a are defined in this specification.The present invention provides insulating elements for multi-chip packages and antireflection films for the exposure process of semiconductor fabrication using said norbornene-based copolymers. Norbornene-based copolymers according to the present invention have low dielectric constant as well as high thermal stability and excellent solubility to various organic solvents.
REFERENCES:
patent: 4080491 (1978-03-01), Kobayashi et al.
patent: 6753127 (2004-06-01), Han et al.
patent: 7033729 (2006-04-01), Jung et al.
Char Kook Heon
Lee Jin Kyu
Park Joo Hyeon
Yang Seung Jae
Yoo Dong Woo
Dickstein & Shapiro LLP
Seoul National University Industry Foundation
Teskin Fred
LandOfFree
Thermally stable low dielectric norbornene polymers with... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thermally stable low dielectric norbornene polymers with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermally stable low dielectric norbornene polymers with... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3852975