Measuring and testing – Volume or rate of flow – Thermal type
Patent
1996-07-17
1997-12-30
Dombroske, George M.
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
057032882
ABSTRACT:
A thermally-sensitive type flow meter measures a flow rate with a high accuracy by eliminating a noise generated in a source voltage. The flow meter includes a sensor chip comprising a substrate carrying sensing elements. First and second resistors are provided on first and second bridges formed over a depression formed on the substrate. The first bridge is positioned on an upstream side and the second bridge is positioned on a downstream side. The first and second resistors generate a heat by the same voltage source. First and second temperature measuring resistors are provided adjacent to the first and second resistors, respectively, to measure a temperature of the first and second resistors. Third and fourth temperature measuring resistors are provided for measuring the temperature of the fluid. A temperature control unit, including the first, second, third and fourth temperature measuring resistors, controls a temperature of each of the first and second resistors to be constant. A flow rate of the fluid is determined based on a voltage difference between a first voltage applied to the first resistor and a second voltage applied to the second resistor.
REFERENCES:
patent: 4319483 (1982-03-01), Durham, Jr. et al.
patent: 4651564 (1987-03-01), Johnson et al.
patent: 5410912 (1995-05-01), Suzuki
Horiguchi Hiroyuki
Nakayama Yoshinobu
Artis Jewel V.
Dombroske George M.
Ricoh & Company, Ltd.
Ricoh Elemex Corporation
Ricoh Seiki Company, Ltd.
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