Thermally isolating optical devices

Optical waveguides – Integrated optical circuit

Reexamination Certificate

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C438S031000, C257S098000

Reexamination Certificate

active

06983086

ABSTRACT:
A thermo-optic device may be formed with trenches that undercut the substrate beneath the thermo-optic device. Through the removal of the underlying substrate, the heat dissipation of the thermo-optic device may be reduced. This may reduce the thermal budget of the device, reducing the power requirements for operating the device in some embodiments.

REFERENCES:
patent: 4966037 (1990-10-01), Sumner et al.
patent: 5013680 (1991-05-01), Lowrey et al.
patent: 6075269 (2000-06-01), Terasawa et al.
patent: 6847750 (2005-01-01), Baumann et al.
patent: 2003/0176002 (2003-09-01), Zhang et al.
patent: WO 01/42848 (2001-06-01), None

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