Thermally isolated integrated circuit

Details Thermally isolated integrated circuit Thermally isolated integrated circuit

1996-10-15

1998-07-21

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Temperature

257468, 257469, 257470, 257713, 257717, H01L 31058

Patent

active

057838542

ABSTRACT:
Thermally isolated circuit formed on a semiconductor on insulator structure includes a semiconductor surrounded by a semiconductor outer portion with an insulator therebetween. A cavity formed in the underlying semiconductor substrate opposite to the island provides thermal isolation.

REFERENCES:
patent: 3769562 (1973-10-01), Bean
patent: 4257061 (1981-03-01), Chapel, Jr. et al.
patent: 5360987 (1994-11-01), Shibib
patent: 5521421 (1996-05-01), Furuhata
patent: 5596219 (1997-01-01), Hierold
patent: 5600174 (1997-02-01), Reay et al.

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