Thermally cured undercoat for lithographic application

Details Thermally cured undercoat for lithographic application Thermally cured undercoat for lithographic application

2005-03-09

2008-08-26

Schilling, Richard (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaged product

Multilayer

C430S270100, C430S271100, C430S312000, C430S327000, C430S909000, C430S910000, C430S927000, C522S050000, C522S057000, C522S059000, C522S132000, C522S146000, C522S152000

Reexamination Certificate

active

07416821

ABSTRACT:
Thermally curable undercoat composition comprising for producing a bilayer relief image comprising:a) a polymer of Structure I comprising repeating units of Structure II, III, and IVb) a phenolic crosslinker;c) a thermal acid generator (TAG); andd) a solvent.

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