Thermally buckling linear micro structure

Details Thermally buckling linear micro structure Thermally buckling linear micro structure

1998-06-08

2000-06-06

Lee, Kevin

Valves and valve actuation

Heat or buoyancy motor actuated

25112906, 251368, 60528, 60529, F16K 3102, F16K 3170

Patent

active

060708514

ABSTRACT:
A thermally buckling linear micro structure, in which by isolating technology a thermal oxidization isolation layer are generated on the two ends of a micro structure, or a material with larger thermal inflation coefficient is deposited, or the area of thermal conduction is reduced so that the two ends of a micro structure has a larger thermal stress and the membrane structure may be heated uniformly so to cause a thermally buckling deformation, therefore, the deformation of the membrane type micro structure is amplified linearly with the input power. This micro structure is formed as a membrane type by a membrane manufacturing technology.

REFERENCES:
patent: 5029805 (1991-07-01), Albarda et al.
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5069419 (1991-12-01), Jerman
patent: 5344117 (1994-09-01), Trah et al.
patent: 5529279 (1996-06-01), Beatty et al.
patent: 5785295 (1998-07-01), Tsai

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