Thermally-actuated microminiature valve

Details Thermally-actuated microminiature valve Thermally-actuated microminiature valve

1991-05-08

1991-10-22

Nilson, Robert G.

Valves and valve actuation

Heat or buoyancy motor actuated

357 26, F16K 3170

Patent

active

050588567

ABSTRACT:
A microminiature valve having radially spaced, layered spider legs, with each leg having first and second layers of materials having substantially different coefficients of thermal expansion. The legs include heating elements and are fixed at one end to allow radial compliance as selected heating of the legs causes flexure. Below the legs is a semiconductor substrate having a flow orifice aligned with a valve face. Flexure of the legs displaces the valve face relative to the flow orifice, thereby controlling fluid flow through the orifice.

REFERENCES:
patent: 4248402 (1981-02-01), Meckstroth
patent: 4474889 (1984-10-01), Terry et al.
patent: 4581624 (1986-04-01), O'Connor
patent: 4869282 (1989-09-01), Sittler et al.
patent: 4943032 (1990-07-01), Zdeblick
"Silicon Micromechanical Devices," James B. Angell et al., Scientific American, Apr. 1983, pp. 44-55.
"Electrically-Activated, Micromachined Diaphragm Valves," Hal Jerman, Technical Digest IEEE, Sensor and Actuator Workshop, Jun. 1990, pp. 65-69.

Affiliated with

Also associated with

Rating

Thermally-actuated microminiature valve does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermally-actuated microminiature valve, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermally-actuated microminiature valve will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-103913