Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Radio frequency switch
Patent
1994-03-14
1995-11-14
Donovan, Lincoln
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Radio frequency switch
333104, 333262, H01H 5300
Patent
active
054670675
ABSTRACT:
An integration of a micromachined actuator and a signal transmission structure includes a thermal actuator on a side of a displaceable signal line opposite to a fixed signal line. The actuator includes first and second legs. The first leg has a cross-sectional area greater than the second leg, providing a differential in electrical resistance. As current is channeled through the legs, the second leg will elongate more and will deflect both of the legs. The deflection is in a direction to press the displaceable signal line into signal communication with the fixed signal line. Optionally, a thermally operated reset actuator can be positioned to provide a mechanical return of the displaceable signal line. In a preferred embodiment, a microwave transmission environment is provided.
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Guckel, H. et al., "Thermo-Magnetic Metal Flexure Actuators," Technical Digest IEEE Solid-State Sensor and Actuator Workshop, 0-7803-0456-X/92, 1992, pp. 73-75.
Hackett, R. H. et al., "The Integration of Micro-Machine Fabrication with Electronic Device Fabrication on III-V Semiconductor Materials,"Transducers '91, International Conference on Solid-State Sensors and Actuators, 91CH2817-5, 1991, pp. 51-54.
Larson, Lawrence E. et al., "Microactuators for GaAs-Based Microwave Integrated Circuits," Transducers '91, International Conference on Solid-State Sensors and Actuators, 91CH2817-5, 1991, pp. 743-746.
Field Leslie A.
Ruby Richard C.
Donovan Lincoln
Hewlett--Packard Company
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