Thermal wave microscopy using areal infrared detection

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

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250338, G01J 100

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active

045785848

ABSTRACT:
A non-contact thermal imaging system based on infrared radiation detection is described which uses an energy source to provide a beam of energy that strikes a sample to be analyzed. The energy beam produces a thermal wave in the sample, there being infrared radiation emitted from the thermal wave. All of the infrared radiation emitted from the heated area of the sample is collected and directed to an infrared detector, to have a two-dimensional image of the sample. This is used to detect surface and sub-surface structure, defects, etc. The use of a focussed energy beam, such as a laser or electron beam, offers advantages. In this technique, all points of the sample are treated equally and the results are very easily interpreted to know the exact location and type of structure that is imaged in the heated area. An ellipsoidal collector is preferrably used to image the emitted infrared radiation onto the detector, where the sample is located at one focal point of the ellipse, and the detector is located at the other focal point.

REFERENCES:
patent: 3790781 (1974-02-01), Horl et al.
patent: 4255971 (1981-03-01), Rosencwaig
patent: 4484820 (1984-11-01), Rosencwaig
Wood et al., "Hemi-Ellipsoidal Mirror IR Reflect", Applied Optics, vol. 15, 4 (1976), p. 940.
Luukkola et al., "Photothermal Imaging & Thermal Waves . . . ", 1982 Ultrasonics Symposium (p. 591).

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