Radiant energy – Infrared-to-visible imaging – Including detector array
Reexamination Certificate
2006-06-27
2006-06-27
Porta, David (Department: 2884)
Radiant energy
Infrared-to-visible imaging
Including detector array
Reexamination Certificate
active
07067810
ABSTRACT:
A fabrication method of a thermal type infrared ray imaging device that includes forming a plurality of diodes in a single crystal silicon layer as first and second thermoelectric conversion parts constituting a thermoelectric conversion part; forming input and output wirings to be connected to a plurality of cells; forming a plurality of opening portions which expose the single crystal silicon substrate; forming a first photothermal conversion layer; and removing selectively a portion of the single crystal silicon substrate via the plurality of opening portions.
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Mashio Naoya
Shigenaka Keitaro
Lee Shun
Porta David
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